Physicists found my Litho unit has a Hi Contrast resolution issue. Here's the following found by physicist : Minimum Resolution = 2lp/mm x (15cm/(FOV in cm))
1) 18cm FOV requires 1.7lp/mm - UMP observed 1.4lp/mm ***( I can verify 1.5lp/mm with a Gammex LinePair Phantom)
2) 12cm FOV requires 2.5lp/mm - UMP observed 2.0lp/mm ***( I can verify 2.1lp/mm with a Gammex Linepair Phantom)
What can I adjust or will have to replace a part? I have no service manuals for this unit. Thanks for any help.
Jere
